An.Introduction.to.Microelectromechanical.Systems.Engineering.2nd.edition

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Posted on 2007-05-23, updated at 2007-05-27. By anonymous.

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This second edition brings readers up-to-date with the latest developement in this cutting-edge areas. Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS
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